UW-MEMS - Image Archive - DXRL Misc







DXRL Misc. Photographs
For more information contact:

Professor Henry Guckel
Wisconsin Center for Applied Microelectronics and Micromechanics
University of Wisconsin - Madison
Department of Electrical and Computer Engineering
1415 Engineering Drive
Madison, WI 53706
phone: [phone]
fax: [phone] (same)
email: [e-mail]

WARNING
The following images are copyrighted by Professor Henry Guckel and
the University of Wisconsin - Madison. These photographs may be used
freely with the copyright intact. A courtesy contact is expected for
re-publication of any of these images.
Description
The images contained in this page were all created with deep x-ray
lithography and electroplating. See the publication archive
for more information.




Other Motors
SEM of
an empty stator which can accept several types of rotors which are
inserted over the center post.
An
example of an electrostatic micromotor originally designed at MIT
but fabricated with deep x-ray lithography and electroplating.

An electrostatic wobble rotor.

An electrostatic rotor.

Another electrostatic rotor.
An
electrostatic resonator fabricate on a quartz substrate.

An electrostatic relay fabricate on a quartz substrate.

Stress Measurement

Guckel Ring structure to measure tensile stress in electroplated
materials. (more
information on this technique)

PMMA Definition
150
microns of PMMA exposed and developed for use as micro motor rotor
molds for electroplating
150
microns of PMMA exposed and developed for use as a gear mold

80 microns of PMMA exposed and devleoped for a linear spring
structure

Micro Tools

100 um wrench.

Gears and hammers (if they don't fit)

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