1F6

■ II

Figurę 2-5. Each type of signal originates within a specific volume of interaction. The size of the volume limits the spatial resolution of the signal. Secondary electrons have the smallest volume, followed by backscaltered electrons. and X-rays.

Sampłe

Pnmary etectron beam

Source of

secondary electrons Source of

backscattered electrons

Source of electron-excrted charactenstic X-rays

Źródło elektronów wtórnych

Elektronów odbitych

• Promieniowania charakterystycznego