Fllt er
Mass flow meter
Brooks
SL15860S
Pressure VH9 Vp3 controller
Brooks
S1A5810A
H , from Pd purifier
He low-pressure
He fWIng
Baratron
Warni stage
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Stainless | |
Steel | |
a Watercootlng i | |
t p & T measuie | |
f Cu |
1 T |
He pressure
Stalnless steel
Cool stage
SI-dl o de temperaturę sensors DT-670B-MT
Cartiidge heaters 2 x 50W
P.noz
Heaters 2 x23W
I
Heater power supply'
Ethernet
Nozzle \:ozzle sliutter