Electronics Materials
" Semiconductor Materials.
Auxiliary Process Materials
" Magnetic Materials
" Optical Materials
" High Performance Polymer
Composite Materials
" Resin Processed Goods
Various kinds of electronics materials provided by Shin-Etsu group are
supported by our established expertise which has been accumulated based on our unique
know-how and constant efforts.
Technologies Products Applications
Semiconductor
Sealing, Protection, Mold Making, Protection against electrical faults
Materials
Conductive rubber, RTV rubber,
Silicone
Polymerization technology
Gel silicone, Fluid, Rubber, Resin and CF Silane, KJR series
Auxiliary Process
Silane
Rubber contacts, Inter-connectors
Materials
OF series
Protective and insulative coating for semiconductor devices
Silicon tetrachloride, Trichlorosilane, Dichlorosilane
Coating material for optical fiber
High purity chloromethane
Organic synthesis technology
Metalorganic precursors
For electronics, For optical fiber, For chemicals
SOLEANA series
Optical Materials
For cleaning of metals, glass, and ceramics
TBP, TMI, TMG, TMA, TEG, DMZ, DEZ
Compound semiconductors
Semiconductor silicon
Epoxy molding compound
Crystal growth technology
Oxide single crystal
Encapsulation of ICs, LSIs, transistors
Compound semiconductor
Cyano resin
For electroluminescence
High Performance Polymer
Silicon wafer, Epi wafer Composite Materials
ICs, LSIs, Transistors
Powder technology LT, BGO
Rare earth
Mobile communication devices
GaAs, GaAllnP, SiC
LEDs, High speed devices
High purity rare earth
For phosphors, For ceramics, For energy
Resin Processed Goods
PBN
CVD technology
Synthetic quartz glass
Rare earth magnets
For hard disk drives, For motors, For sensors
Insulation jigs
Crucible for pulling of compound semiconductors,
Crucible for MBE
Compound semiconductors
Precision working technology
Quartz glass
Optical fiber
Ceramics
Preform for optical fibers,
Photomask substrates, Liquid crystal substrates
Photomasks
Liquid crystal display
High purity natural quartz glass, Synthetic quartz glass
Polyimide film
Plastic surface treatment technology
Polypropylene film
For optics, For optical communication, For semiconductor industry
Flexible copper- clad laminates
Flexible printed circuit substrates
Magnetic Materials
R type film
For condensers
Plastic working technology
Electropackage
Semiconductor transporting formed goods Carrier tape, Top tape
1 2
Shin-Etsu group's technology and materials are now being effectively used in all areas of
every scene of the semiconductor manufacturing industry.
Polishing
Cutting
Raw materials Poly crystal Single crystal growth
*300 mm dia. silicon ingot
*Semitransparent quartz crucible for
pulling of single crystals
*Compound semiconductor
*PBN
*LT
Epitaxial wafer
*High purity silane
*Ultra high purity
metalorganic precursors
Silicon wafer
*Semiconductor
transporting container
Dicing
Oxidation, Diffusion,
Film formation
Devices
*Quartz glass for semiconductor
*Silicone RTV rubber
industry (Core tubes, boat)
*Heat radiating silicone rubber
*PG/PBN heater
Resin sealing
composite sheet (TC-TKC type)
*AlN heater
*Silicone molding compound
*Carrier tape
*Epoxy molding compound
Pattern formation
*Semicoat series
*Synthetic quartz substrates
Assembling
*Synthetic quartz glass for photomasks
*KJR series
*Silicon electrode plate
(Junction coating resin)
*Synthetic quartz glass for excimer laser steppers
3 4
" Semiconductor Materials.
Auxiliary Process Materials
Shin-Etsu group, as a leading manufacturer of
silicon wafer, is now providing various kinds of
semiconductor substrate, to say nothing of
silicon wafer, based on crystal growth technology.
Our gas, chemicals, and jigs used during
the wafer manufacturing process have also been
highly rated.
Large diameter (300 mm) ingot/wafer Compound semiconductor materials
With the increasing demands for higher integration of devices Shin-Etsu Handotai is manufacturing gallium phosphide (GaP),
(LSIs), the diameter of the silicon wafer has become larger and gallium arsenide phosphide (GaAsP), and gallium aluminum
larger. The next generation device will use a 300 mm dia. wafer, as arsenide (GaAlAs) products which are used for light emitting
against the conventional 8 in.(200 mm) dia. silicon wafer. diodes and lasers as a luminescent element material in the
Features " Polished wafers realize a high evenness and cleanness of optoelectronics field. In addition to these products, a product
surface with our high precision polishing method. " The epitaxial wafer, for series of a gallium arsenide (GaAs) wafer (used for
which complex and strict growth conditions are required, has also been optoelectronics), which develop a new function lacking in silicon,
highly rated. are available for sale in the form of chips.
Applications " Memory device substrates, micro-processor substrates, Features " The products cover both the fields of the GaP and the GaAs
and so forth. substrates. " The products are under thorough production from crystals to
substrates, epi, and chips. " Brightness, color tone, and electric
characteristics backed with our excellent crystal technique, liquid phase and
vapor phase epitaxial growth technique, and forming technique at each
process have been rated highly both inside and outside of Japan.
Applications " For visible light and infrared rays. For functional
applications.
5
Oxide single crystal LT Synthetic Quartz Substrate
Stable composition crystals are made by controlling the lattice Shin-Etsu Chemical, as a leading manufacturer of synthetic quartz
constant. This assures small difference in SAW velocity which substrates, has provided the highest quality products for more than
leads to a high yield in device production. 15 years. Today, the company is meeting increasing needs for
Features " Strict control in crystal growing realizes a high precision larger types of substrates for liquid crystals and wafers for TFT.
composition. " High precise wafer process corresponds with delicate Line-up " For quartz substrate for ICs, the products ranging from the SMS
device patterns. grade (whose faulty size is less than 2 µm) to the SZS grade (whose faulty
Applications " X cut - used for TV, VCR SAW filters " 36° Y cut - used size is less than 1 µm) are provided. In addition, the EX-1 grade (whose
for mobile communication SAW filters " Z cut - used for nonlinear optics faulty size is less than 0.5 µm) is now under development. " For wafers, the
and for pyroelectrotic devices SX wafer for TFT which is excellent in thermal resistance is mainly supplied.
The wafer for common use monitors is also available. " For substrates, in
addition to ordinary large type substrates, an ultra large type substrate of
more than 620 x 720 mm is
also available.
Applications " As a photo-
mask synthetic quartz sub-
strate for IC, a large type
synthetic quartz substrate for
LCD, a synthetic quartz SX
wafer for TFT, and a synthetic
quartz DQ wafer for monitors.
Synthetic Quartz Glass for Photomasks
Due to its excellency in ultraviolet light transmission and extremely
low thermal expansion coefficient, the products is best suited for
photomask substrates.
Features " Super high purity product without any bubble or foreign
matter. " Striae-free.
Line-up " In addition to the VIOSIL-SMS grade for ordinary standard
goods, the VIOSIL-SZS grade with less surface defect is provided. " The
Synthetic Quartz Glass Wafer
VIOSIL-NFS grade is also provided for high accuracy mask substrate for
The product is suited for substrates requiring heat resistance and excimer laser lithography.
highly accurate polishing.
Applications " For crystal liquid poly-Si substrates, etc.
Semitransparent Quartz Crucible for Pulling of Single Crystals
Line-up " The external diameter is provided from 3 in. to 8 in.
The product is manufactured with our own unique method using
the same raw materials as that for transparent quartz glass.
Features " The purity is the same as that of the transparent goods. " The
internal surface is even and smooth coated with a transparent layer with an
extremely small quantity of bubbles.
Line-up " Various sizes up to 36 inches are available for production of
silicon ingots up to 300 mm diameter. " The material grade ranges from
standard to super high purity depending on their applications.
6
Quartz Glass for Semiconductor Industry PG/PBN Heater
We are making efforts in the semiconductor industry with our wide The product is a ceramic heater made by laminating two kinds of
range of products and excellent processing technology to cope ceramics (PBN, PG) manufactured by the pressure reduced heat
with the increasing requirements of today's technological decomposition CVD method.
innovation including conversion from horizontal furnace to vertical Features " A large type heater having a max. diameter of 300 mm can be
and realization of a larger size diameter of wafers. developed. " It is highly pure and strong against thermal impact. No
Line-up " Various kinds of outgassing occurs (being able to cope with high vacuum). " The heater
grades ranging from standard to pattern may be designed freely. The allowable highest temperature of the
high purity grade natural quartz heater is 1,600°C. " It includes a wafer heater and a pipe heater.
glass are available. " Type that is Applications " As spatters for the semiconductor manufacturing process,
treated and stabilized to raise the heaters for heating substrates of CVD devices, etc. " As heaters for heating
degree of heat resistance. " Ultra samples for a electron microscope, nozzle heaters for heating gas. " An
high purity synthetic quartz deve- electrostatic chuck can also be manufactured.
loped for the next generation LSI.
Applications " For furnace core
tube or boat in the oxidation and
diffusion process, or the CVD
process. " For tanks used in the
cleaning process such as chemical
treatment or ultra deionized water
cleaning.
PBN (Pyrolytic Boron Nitride)
The product is a kind of ceramics manufactured with a thermal
decomposition under reduced pressure. It is mainly used for
breeding III-V group compound semiconductor crystals such as
Quartz Heater
GaAs, which are attracting more and more attention as an element
for the mobile communication MMIC or for optical devices. The product is a ceramic heater manufactured by metalizing a
Features " The product is pure and stable chemically, and also excellent particular resistor to synthetic quartz.
in high temperature strength. " Excellent in thermal conductivity Features " The product has a high purity and a strong resistance against
characteristics with a high electric insulation. thermal impact. " Being a plane type heater, a larger type can be easily
Applications " For pulling of single crystals of the III-V group manufactured (max. 550 mm x 650 mm). " The heater pattern may be
semiconductor (GaAs). As crucibles, insulating jigs, etc. " As dopants for designed freely. The allowable highest temperature of the heater is 800°C.
doping of boron into silicon wafers. " For new application fields other than Applications " As a heater for heating large type liquid crystal glass
compound semiconductors. substrates.
AIN Heater
A ceramic heater metalized with a particular resistor by using the
Shin-Etsu AIN (W-200).
Features " A large type heater having a maximum diameter of 300 mm can
be manufactured. " Being excellent in heat conductivity and strong against
thermal impact, it can be used without limiting atmosphere. " The heater
pattern can be designed freely. The allowable highest temperature of the
heater is 800°C.
Applications " As spatters for the semiconductor manufacturing process,
heaters for heating substrates of CVD devices, etc. " As heaters for heating
samples for a electron microscope, nozzle heaters for heating gas. " An
electrostatic chuck may also be made.
7
Silicon Electrode Plate Epoxy Molding Compound
A high purity and low particle plate. With the progress of semi- The compound is a encapsulation material with a low stress, a low
conductor devices. It has become the leading electrode plate Ä…-ray characteristics and a high degree of thermal conductivity.
replacing the conventional carbon plates. Features " Excellent in humidity resistance, electric properties, and
Features " A silicon single crystal with a large diameter (max.300 mm moldability. It also satisfies severe conditions required for encapsulation of
dia.). " High purity, low particle and long life. It is also excellent in forming devices.
accuracy. Applications " For encapsulation of LSI including D-RAM and full pack
Applications " For electrode plates for the oxidized film etching equip- power devices.
ment of the semiconductor manufacturing process.
Ultra High Purity Metalorganic Precursors
The compound is a raw material for epitaxial growth used for
compound semiconductor devices. It includes TBP, TMGa, TMIn,
TMAl, TEG, DMZn, and DEZn.
Features " For all the sorts of the compound, high purity of less than 0.1
ppm metallic impurities is assured. " The solid raw material TMIn has also
accomplished the feed stability of Ä…0.002 vol % (20°C) by improving of
containers and devising filling method. The low oxygen TMAl has been
developed by our unique method. " The TBP is a safety liquid raw material
substituted for the PH3 gas. " We are now coping with user's needs with
our unique technology and high level analyzers.
Semicoat Series
Applications " For HEMT, FET, lasers, ultra high brightness LEDs
(including a blue color), solar cells, etc. The series is a liquid epoxy resin sealant for protection of semi-
conductor (including CSP etc.) devices.
Features " Excellent in low stress characteristics, adhesion, and
KJR Series (Junction Coating Resin)
penetrability.
The series contributes for improving the functional effect such as Applications " For electric and mechanical protection of devices
electric protection and humidity resistance, stress relaxation,
prevention from soft errors of the memory devices.
Semiconductor Container
Features " The series is highly pure and excellent in adhesive strength
and workability. The product is a container for storing or transporting materials
Applications " As a protective and insulative coating for semiconductor required for manufacturing of semiconductors.
devices. " For a wide range of application including electric, electronic, Features " Manufactured by using unique high purity materials.
optical devices and LCD. " Molded in the clean room. " Designed so as to be optimum to contents.
Applications " Wafer shipping boxes. " Mask substrate containers.
" Reticle containers
Silicone Molding Compound
The compound is a thermosetting molding material produced by
blending various kinds of fillers to silicone resin.
Features " Excellent in thermal resistance, cold resistance, and electric
characteristics. " Particularly glass fiber blended products are also
excellent in mechanical strength as well.
Line-up " For encapsulation of semiconductor devices, and for
encapsulation of usual heat resistant parts.
8
Carrier Tape Shin-Etsu "SOLEANA" Series
Package material for transporting semiconductor devices or A highly functional solvent based on methylene chloride. Due to its
various chip electronics parts. excellent characteristics, it is useful for the quality control of the
Features " A carrier tape forming technique coping with the fine package products as washing agent for various electronics devices. It also
such as QFP, BGA, CSP, etc. has been established by carrier tape design contributes considerably for increasing production efficiency.
simulation. " A carrier tape coping with image recognition in considering Features " Of organic solvents, it has the strongest solvent power. " It is
of the PKG appearance inspection under the taping process is provided. excellent in chemical stability with no fear of quality deterioration, which
This contributes to fractional distillation up of the inspection in the taping allows easy liquid control. " The solvent may be used repeatedly by means
process. " The baking treatment which has depended on the heat resistant of distilling regeneration. " Its low boiling point makes it possible to treat
tray, is made possible to substitute for the carrier tape by our developing under low temperatures which leads to increased efficiency production. In
effort including the field of materials. addition, economic benefit may also be expected by raising the yield of
Line-up " The general grade for ordinary circuit parts and conductive distilling regeneration.
grade for semiconductors are provided. Line-up " Shin-Etsu "SOLEANA" VD, VDA, and VDT grades are a highly
functional washing agent. Used for steam washing for degreasing various
metals for electronics, glass parts, ceramics parts, etc. " Shin-Etsu
"SOLEANA" HS is a highly functional water swishing agent used for various
metals for electronics, glass parts, ceramics parts, etc. " Shin-Etsu
"SOLEANA" L is a accurate mold washing agent used during manufacturing
optical plastic lenses.
High Purity Silane
The product includes silicon tetrachloride, trichlorosilane, and
dichlorosilane.
Features " The product can be used over a wide range of applications
depending on the kind of silane.
Applications " For electronics including semiconductor film, epi film, etc.
" Silicon tetrachloride is used for optical fiber. " Trichlorosilane and
silicon tetrachloride are used for chemical applications such as many kinds
of organic chemical reactions and fine ceramics.
High Purity Chloromethane
A high quality and highly stable products is provided based on our
unique reaction technique, high level refining technique, and
development of an excellent stabilizer, by using natural gas,
methanol, and chlorine which are produced in the vicinity of the
Shin-Etsu Chemical Naoetsu plant, as raw materials. It includes
methyl chloride, methylene chloride, and chloroform.
Features " It has an extremely strong dissolving power as solvents. " It
has a wide range of applications as various reaction materials. " By using
as reaction solvents, yield may be increased. " The low boiling point
makes it possible to be used as a low temperature extraction solvent.
Line-up " Methyl chloride is used as raw materials for silicone resin,
methyl cellulose, agricultural chemicals, surface-active agents, and perfume,
and caffeine as a low temperature extraction solvent. " Methylene chloride
is used as a reaction solvent for plastics, medicine, agricultural chemicals,
and perfume, or as a fine washing solvent for various electronics devices
and optical devices. " Chloroform is used as a reaction solvent or a
extraction solvent for medicine, agricultural chemicals, dye, and perfume, or
as reaction materials for the fluorine resin.
9
" Magnetic Materials
Our products have been based on our separation
and refining technology for rare earth metals
accumulated for long years.
We are providing them as a "seasoning" of the
high technology industry in various fields.
We are now also engaged in the development of
rare earth magnets and magnetic circuit
components for head actuator of hard disk drive.
Rare Earth Rare Earth Magnet
Rare earth is a "Vitamin compound for high technology" which The product is a high quality permanent magnet using rare earth as
works well even with addition of its small quantity. Now it is an the raw materials. The magnets are manufactured under a strict
indispensable element for the development of the industry and the quality control sequential production system, from the separation
improvement of daily life. and refining of rare earth metal elements through to the finished
Features " With cooperation of our Manufacturing, Selling, and magnets. Shin-Etsu is the only rare earth magnet manufacturer to
Researching Sections, products may be available for coping with market refine our own rare earths. Support is also available for develop-
needs. " Our stable supplying power and technical development power are ment and production of magnetic assemblies and other magnetic
highly rated both at home and abroad. circuits.
Applications " Rare earth oxides are used for red phosphor of color Features " Three kinds of rare earth magnets are available, including
cathode-ray tube, high color rendering tri-band fluorescent lamp, X-ray neodymium (Nd), samarium (Sm), and cerium (Ce) magnets (the only
sensitizer, fine ceramics, optical glass, electronics parts, etc. " Rare earth manufacturer to provide all three materials. " Magnetic characteristics
metal is used for magneto-optical disks, mini-disks for music, and giant range from maximum energy products of 10 MGOe to 45 MGOe.
magneto-strictive alloys. " Development of highly heat resistant neodymium rare earth magnets has
allowed high temperature application to become possible.
Applications " For compact high power motors, computers, mechanical
and electrical devices, home appliances, and all applications using magnets
such as in transportation, communication, and measurement.
Single Crystal Ferrite
Mn-Zn single crystal ferrite is a highly quality and high functional
head material with no foreign matters or strain.
Features " Excellent high frequency characteristics.
Applications " Head materials for VCR, 8 mm VCR, DAT, FDD, and HDD.
10
" Optical Materials
We have developed various kinds of optical
materials including photomask substrates for
lithography, synthetic quartz preforms for optical
communication, and various optical parts based
on natural and synthetic quartz.
The products ranging from elements to worked
goods have been widely provided.
Synthetic Quartz Preform for Optical Fiber Transparent Quartz Glass for Optical Communication
One of the products group of Shin-Etsu Chemical featured by Si- Shin-Etsu Quartz Products have provided quartz tubes used during
chemistry. The products is a glass rod based on high purity preform manufacturing process, since the start of our optical fiber
synthetic quartz whose internal structure is designed so that research.
incidence rays pass through without decay. Features " For the manufacturing process, an original tool free method is
Features " The product is produced under a complex high level used. The inner and outer surface of the tube is even and smooth with no
manufacturing process based on highly reliable quality control and defects. " The product includes natural quartz glass and synthetic quartz
computer technology. Stable high quality is assured for the product. " We glass which may be selected depending on their applications. " The
have developed a larger type preform (160 mm dia. x 1,500 mm long) which SUPRASIL-F300 is a synthetic quartz for optical fiber with ultra high purity
is now produced under an established mass production technique. and extremely high quality.
Applications " For fiber used for optical communications, image guides, Applications " As communication cables for wide band, long distance
laser transmission. transmissions.
Coating Material for Optical Fiber
A coating material using liquid silicone rubber as a raw material
which prevents increase of loss due to micro-bending of optical
information passing through the optical fiber (quartz glass) in
reflection, thereby increasing transmission characteristics. The
agent has also a protective function against mechanical stress such
as side pressure to the fiber.
Features " The material is excellent in heat resistance and low
temperature resistance, and shows a stable function over a wide temperature
range.
Line-up " For primary coating, buffer coating, and polymer cladding.
" Under classification by curing type, other than the heating type, the UV
setting type which copes with a high speed drawing is also provided.
11
Optical Isolator Transparent Quartz Glass for Lamp
The key component of the isolator is composed with Shin-Etsu The product is manufactured with our own unique tool free
Chemical's own products. This is a highly reliable optical passive method. Its inner and outer surface is even and smooth without
part. defects.
Features " Ultra compactness and high reliability. " Faraday rotator Applications " For UV lamp material, etc.
based on Shin-Etsu Chemical's own oxide growing technology. " The line- Line-up " The M series for the ozoneless type. " The HERALUX series for
up; 1.31 µm, 1.55 µm, and 1.48 µm, all with single and double type. the ozone type. " The SUPRASIL-F series which is excellent in trans-
Applications " For DFB laser module used in the optical fiber network mittance characteristics from vacuum ultraviolet to infrared.
(relay system, CATV).
Synthetic Foamed Silica
The product is manufactured with a unique method using the same
raw materials as those of the conventional synthetic quartz glass.
Features " The heat resistance, the chemical stability, and the purity are
the same as those of the synthetic quartz glass. " The apparent density
reduces its weight to about 1/10 lighter than that of standard quartz glass.
" It is workable and well suited for fabrication.
Applications " As a high purity heat resistant material or insulative
material, or for light weight reflecting mirrors.
Synthetic Quartz Glass for Optics
This quartz glass is a synthetic quartz glass developed combining
the manufacturing technique introduced from Heraeus (Germany)
and Shin-Etsu group's excellent technology in synthetics.
Features " No glassy granular structure and no fluorescence under 235
mm mercury lamp. " Dependent on the presence of stria, three grades are
available.
Applications " As a lens material for excimer laser stepper. " For
prisms, lenses, windows, windows for various lasers and mirrors.
12
" High Performance Polymer
Composite Materials
We are now providing various kinds of polymer
composite materials for electronics such as
silicone as a heat resistant insulating material,
cyanoresin excellent in inductivity.
RTV Rubber Silicone Gel
The product is a liquid or pasty rubber used for adhesion, sealing, In addition to properties inherent in silicone such as electric
or potting of electrical or electronics devices. insulation, thermal and cold resistance, transparency, and so on,
Features " The product develops an excellent adhesive power against all the product features gelation after hardening, which differs from
the materials such as glass, tiles, metals, and plastics. " It maintains a the conventional silicone RTV rubber.
stable electric characteristics under a circumferential variation in Features " An excellent fluidity makes it possible to fill up details.
temperature and humidity. " It absorbs vibration or impact with an " Excellent in stickiness and adhesion in addition to sealing performance
excellent elasticity after hardening. " Excellent in chemical resistance and and humidity resistance. " Being soft, it deforms easily with a light load or
oil resistance. pressure. " A low elastic modulus makes it possible to relax stress due to
Applications " For adhesion, sealing, and potting of electrical and thermal expansion, etc.
electronics devices. Applications " In the fields of electrical, electronics, and OA equipment,
and computers, it is used as a sealing material for each part of the clean
room interior. It is used also for sealing and protection of power modules
and for a light path filler. " In the field of the automobile, it is used for
sealing and protection of hybrid ICs for the regulator and the igniter, and for
the vibration isolator.
Radiating Silicone Grease
G748 is an oil compound which has excellent thermal conductivity
improved by 1.5 times over other existing products. Since this new
product is a soft type, it is very easy to handle and process.
G765 is another oil compound which has superior thermal
conductivity improved by 3.5 times over other existing products. It
is especially fit for the thermal radiation of personal computer
CPUs which require a high
level of thermal conductivity.
Features " Both compounds
are superior in thermal conduc-
tivity to any other existing
product of our company (e.g.
G747).
Applications " Thermal radi-
ation for computer CPUs.
" Thermal radiation for other
semiconductor elements and
transistors.
13
Radiating Silicone Rubber Composite Sheet (TC-TKC Type) Electrically Conductive Silicone Rubber (EC Series)
The product is manufactured by molding the radiating silicone The product is optimum for preventing electromagnetic wave from
rubber with a low hardness and radiating sheets integrally. computers, OA equipment, medical instruments, and so on, and
Features " Being soft and excellent in adhesion, it develops a high static on various electrical and electronic equipment.
stickiness even at a severely uneven place, resulting in an excellent radiation Features " It has a high electric conductivity and thermal conductivity.
effect. " Excellent in thermal conductivity and fire resistance. " It may be " Excellent in cold resistance, thermal resistance, and weather resistance.
used over a wide temperature range ( - 60°C - + 180°C ). Applications " For cabinets for computers, etc., packing for portable
Applications " For radiation of MPUs used for computers and so on. telephones, cordless phones, wireless equipment, various medical
" For radiation of heat emitting semiconductor elements. instruments, and BS converters, and as gaskets for architecture,
electromagnetic wave shields around windows of the computer room. " As
electrodes for polarization of ceramic vibrators, electrodes for medical
instruments, holders for compound semiconductor wafer, and thermal
conductive media for cooling, and as substitution for spring contacts and
soldering. " For sensor parts utilizing the variation of electric resistance.
Also for conductive or semi-conductive rolls for OA equipment.
Heat Shrinkable Silicone Rubber Tube (ST Series)
The product is a silicone rubber tube whose internal diameter
shrinks to about 1/2 when heated. It is used for insulation, pro-
tection, and coverage.
Cyanoresin
Features " It shrinks within a short time by heating, resulting in labor
saving and increased a working process efficiency. " Excellent in electric The product is so constructed as to contain a cyano group with
characteristics, heat resistance, and cold resistance. " Being a rubber large porality in the molecule. As a result, it shows a high dielectric
elastic body, it squeezes covering objects with stress when shrinking with constant by forming a large dipole in the electric field. The product
the airtightness of covering increasing. is roughly classified into the polymer type and the plasticizer type.
Applications " In the field of the heavy electric equipment and the light Features " The polymer type may form to film sheets by dissolving in
electrical appliance, it is used for insulating coverage for generators and various organic solvents. " The plasticizer type (CR-U) is a sticky liquid
vehicle motors and for joining of power and communication cables. " In developing an excellent plasticity. It may increase the limberness and the
the field of electrical appliances, for protective covering of heater wire curl resistance of films by adding to the polymer type.
terminal parts of electronic ranges and electronic jars, and for protection of Applications " For electric and electronics parts requiring high
the wires for CD players. " In the field of transporting equipment, dielectrical material, such as a organic dispersing type electroluminescence.
application to ignition plugs of automobiles and for terminal treatment of
various harnesses. " For various rolls, for masking of paint, etc.
Pure Sealant
The product is suitable for joints, around air filter, and sealing of
piping penetrating parts in the clean room of the semiconductor
manufacturing process.
Features " Volatization of low molecular weight siloxane hardly occurs.
" Being excellent in adhesion, it is fitted for almost all materials to be
adhered. " Excellent in durability, heat resistance, and weather resistance.
" Being single component system, it may be treated easily.
Applications " For interior joints in the clean room related to manu-
facturing and processing of semiconductors and various fine electronics
materials, and sealing around air filters. " For adhesive sealing of various
parts on the electric system of precision equipment.
14
" Resin Processed Goods
By making the most of our forming process
technology, we are providing highly reliable
materials and parts including polypropylene film
for capacitors, and silicone rubber processed
rubber-contacts and inter-connectors.
Shin-Etsu Rubber-Contact (KTP-type) Shin-Etsu Rubber-Contact (PB-type)
Shin-Etsu Rubber-Contact is a high functional part for inputting, Only the key top part of the conventional rubber contact is sub-
using conductive silicone rubber as switching elements. stituted for plastic materials which are integrated with silicone
Particularly the KTP-type, focuses switching function, spring rubber.
function, and operation button function on only a silicone rubber Features " The key top part has the same hardness feeling as the
sheet. On the key top part, letters and figures are printed integrally. conventional resin key top preventing adherence of dust and stains. " The
Features " The hardness and the color of the key top part may be selected key top part and the silicone rubber part is integrated with a chemical
from Shin-Etsu Polymer's standard variation. " The use of a light reaction. " Both parts are more firmly adhered than the conventional parts
transmissible material enables the adoption of a light shining type key. preventing peeling due to variation in stress or circumference. " Easily
" Printing of letters and figures on the key top surface is possible within the allow for multi-color key tops, or for any color changes required. " The
range of Shin-Etsu Polymer's standard variation. " The production and materials for the key top part are highly transparent and develop bright
control process for assembling, mold making, etc. may be remarkably colors. " Letters and figures may be printed on the surface of the key top.
rationalized. " In a key sheet, different plural key shapes and operation The wear resistance is also improved remarkably as compared with the
feeling may be provided. " Either of formed contact and printing may be conventional products.
selected as a conductive part. " Because we use silicone printed ink, the Line-up " The product is classified by the mother material strength
product is excellent in circumferential characteristics such as heat and cold improved N type and the U type with fire resistance (equivalent to UL-HB).
resistance. " The KTP-SH type with a coated layer which improves
abrasion resistance and surface feeling of the printing part is also provided.
Shin-Etsu Rubber-Contact (AP-type)
Applications " For a wide range of applications including remote control
units of TVs or VCRs, and electronic calculators and telephones. In this type, a highly transparent hard resin key top is adhered on
the semitransparent Rubber-Contact. On the back of the key top,
letters are printed. The type may be integrated with the PET or
metal dome.
Features " Since the alphanumeric letters are not printed on the key top
surface, the AP-type features semi-permanent printing durability. " The key
top has the same feeling of hardness as conventional resin key tops. Dust
and dirt do not stick to the key top. " The key is extremely transparent,
allowing for a special appearance. " Oil or grease will not penetrate the key
top. " The key top part and the switching part are tightly bonded. The stress
of normal use, or the changes in environmental conditions will not cause
separation between the two parts.
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Shin-Etsu Rubber-Contact (HG-type) Flexible Copper-Clad Laminates
The HG-type Rubber-Contact lights up only the letter that is The products develops the following features based both on the
illuminated, via a light-transmissive material. The HG-type was particular modification technique of film surfaces, and on the
developed and marketed by Shin-Etsu Polymer, and is the first of development of unique adhesive, and laminating technique.
its kind in the world. Features " Based on our high level laminating technique in addition to
Shin-Etsu Polymer enjoys a reputation for excellence in the fields our high quality modification of films with particular treatment, a fine
of handheld phones, and car audio equipment, using its unique dimensional stability is realized. " The polyimide has cleared the solder
molding technology to coat rubber keypads in black, and then cut heat resistant temperature requirement of more than 350°C/30 sec. " It has
the letter portion out only. realized the elastic fatigue limit of the number of bending of more than
Line-up " In addition to the HG-type, the HG-SH type featuring a coated hundred million times ( in R = 3.5). " Thin goods (12.5 µm polyimide film
layer to improve the abrasion resistance of the letter part is also available. based copper-clad laminates) is especially excellent in flexibility.
Line-up " Copper-clad laminates composed of combination of various
polyimide films (12.5 - 125 µm ) and various copper foils (18.5 - 70 µm),
Inter-Connector
various polyimide film based coverlay films, and bonding sheets are
Particular connectors such as a compression type inter-connector, available. Under all circumstances the product is an on-UL standard article
which enables electrical connection only by applying a moderate in which a fire resistant epoxy type adhesive is used. " The copper-clad
pressure between electrodes, and a heat seal type connector laminates include the 47 series (high bending strength grade), and the 5
designed freely, are available. These inter-connectors cope with series (high temperature peeling, high density grade) in addition to the 47
various high density packaging, such as, for liquid crystal displays. series for general use grade). " For the coverlay films, the C type is fitted
Features " The inter-connector increases the reliability of a high density for every copper-clad laminates. " The E type is a bonding sheet.
package.
Applications " For liquid crystal displays of OA equipment, telephones,
electronic calculators, clocks, etc.
Shin-Etsu "PP Film - R Type"
The film is manufactured as a dielectric material for capacitors with
a simultaneous biaxial stretching method based on the inflation
method. This makes it possible to develop a smaller sized capacitor
for an especially high voltage. We have also developed an "all film
capacitor" boasting of the No.1 capacity per single device in the
world of 30 Mvar.
Features " Having a roughness of uniform meshy construction, the film
surface is excellent in oil
MT Type Inter-Connector
impregnation and optimum
The inter-connector is an anisotropic conductive sheet in which as a dielectric for all film
gold plated fine metallic wires are arranged at a high density. capacitors. Due to strictly
Features " Metal wire being arranged under a inclined state with high selected raw materials and
density, the product is excellent in resolving power, compression stability, severe quality control, excel-
durability, and vibration resistance characteristics. lent electric characteristics
Applications " For inspection of surface package type IC such as LGA, and reliability are realized.
BGA, etc. By use of strictly selected raw
materials and by means of
severe quality control, excel-
lent electric characteristics
and reliability are realized.
Applications " For all film
capacitors for electric power
and for consumers.
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Your request for information concerning to our technology and products will
be welcomed at our following business location:
For Business Contact http://www.shinetsu.co.jp Main Products Main applications
Heat shrinkable silicone rubber tube For insulating coverage, generators, joining of power and communication cables
Radiating silicone grease For MPU, For radiation of heated semiconductor element
Radiating silicone rubber composite sheet For MPU, For radiation of heated semiconductor element
Silicone Division
RTV rubber For adhesion of electrical and electronics equipment, For sealing, For potting
TEL: [phone]
Silicone gel For sealing, protection, vibration proof, and shock absorbing damper for computers and OA equipment
Electrically conductive silicone rubber Elimination of electromagnetic wave and static from various electric and OA equipment
Pure sealant For sealing of clean room
Rare Earth & New Materials Department Rare earths For phosphor, magnet, fine ceramics, optical glass, etc.
TEL: [phone]
Rare earth magnets All the applications relating to magnetism including motors, hard disk drives, etc.
Magnet Department
TEL: [phone] Single crystal ferrite For heads for VCR, DAT, hard disk drives, etc.
Epoxy molding compound For encapsulation of semiconductor resin
Electronics Materials
Junction coating resin For surface coating of semiconductor devices and in the wide range of relating fields
Division
Organic Electronics Coating materials for optical fiber For optical fiber
Materials Department
TEL: [phone] High purity silane For electronics, For optical fiber, For chemicals
Silicone molding compound For encapsulation of semiconductor, For encapsulation of general heat resistant parts
Semicoat series For electric and mechanical protection of electronic devices
Oxide single crystal LT For SAW device of TV, VCR, etc. For SAW filter for Mobile communication
Synthetic quartz substrate For photomask substrates for IC, large type substrates for LCD, etc.
Synthetic quartz preform for optical fiber As a fiber for optical communication, image guide, and laser transmission
PBN Crucible for pulling of III-V group semiconductor single crystals, Crucible for MBE, Boron dopant material
Electronics Optical isolator As optical passive parts used in optical fiber network
Advanced Materials
Materials Department
Division
TEL: [phone] Silicon electrode plate As electrode plate of oxide film etching equipment in semiconductor manufacturing process
PG/PBN heater For heating spatter in semiconductor manufacturing process and CVD device substrates, and for heating electron microscope samples
Quartz heater For heating large type liquid crystal glass substrates
AIN heater For heating spatter in semiconductor manufacturing process and CVD device substrates
TBP, TMG, TMI, TMA, TEG, DMZ, DEZ For HEMT, FET, semiconductor laser, ultra high brightness LED (including blue color) , solar cell, etc.
Semiconductor Materials Division TEL: [phone] Silicon wafer For substrates of memory devices, substrates of microprocessor devices, etc.
Organic Chemicals Division TEL: [phone] High dielectric polymer (cyanoresin) For organic dispersion type electroluminescence material, various electric and electronics parts requiring high dielectricity, etc.
Shin-Etsu "SOLEANA" series As washing agent or swishing agent for various metal, glass, and ceramics parts for electronics
Chlor, Alkali & Derivatires Department
TEL: [phone]
High purity chloromethane As reaction raw materials, extraction solvent, and washing solvent
International Division TEL: [phone] Flexible copper-clad laminates For computers, hard disk drives, OA relating equipment, camera, automobile, etc.
Shin-Etsu Handotai Co., Ltd. TEL: [phone] Compound semiconductor As luminescence element material in optoelectronics field
Rubber-Contact As remote controller for TV, VCR, etc. or keyboard for OA equipment, electronic calculator, and telephone set
Inter-Connector For liquid crystal display of OA equipment, telephone set, electronic calculator, watch, etc.
Shin-Etsu Polymer Co., Ltd.
MT type inter-Connector For inspection and packaging of area array type surface packaging IC package
TEL: [phone]
Carrier tape Packaging material for transporting semiconductor devices, various chips, and electronic parts
Container for semiconductor For wafer, For mask, For reticle
Quartz glass for semiconductor industry For core tubes, boat, and washing tank for oxidation, diffusion, and CVD process
Synthetic quartz glass for optics For prism, lens, window, and mirror for laser
Synthetic quartz glass for photomask As photomask substrates for IC
Transparent quartz glass for optical communication Materials for optical communication fiber
Shin-Etsu Quartz Products Co., Ltd.
TEL: [phone]
Transparent quartz glass for lamp For UV lamp materials
Semitransparent quartz crucible for pulling of single crystals As crucible for pulling of silicon single crystal
Synthetic Foamed Silica For thermal insulating and humidity retaining materials for high purity SiO2, and for mirrors for laser
Synthetic quartz glass wafer For TFT substrates
Shin-Etsu Film Co., Ltd. TEL: [phone] Shin-Etsu PP film For all film capacitor for electric power or for consumers
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