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2    In the dialog box that opcns dick thc General tab.

3    Clear the Slice check box, thcn select thc Boundary check box.

4    ClickOK.

5    From the Option menu choose Suppress>Suppress Boundaries.

6    Select Boundaries 1,2,4, 5, and 7.

7    ClickOK.

8    On the Main toolbar dick the Postprocessing Modę button to get from the boundary selection modę back to the postprocessing plot.

Computing the Capacitonce

As a finał step, display the capacitance value computed by integrating the electric energy density over the geometry.

1    From the Postprocessing menu choose Data Display>Giobal.

2    In the Expression edit field type C11_emes.

3    ClickOK.

The value of the integral, 2.MO-14 (0.021 pF), appears in the message log at the bortom of the screen.

50 | CHA

PTER 2: MEMS ACTUATOR MODELS