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13 Nanotechnology Tools For Nanoscience Building 8locks Evolving Interfaces Applications Help Exit

Photolithography

Photolithography is a process used in microfabrication to selectively remove parts of a thin film. It uses light to transfer a geometrie pattern from a photomask to a light-sensitive Chemical i.e. photoresist on the substrate.

A series of Chemical treatments then engraves the exposure pattern into the materiał underneath the photoresist. In a complex integrated Circuit (for Exam. modern CMOS), a wafer will go through the photolithographic cycle up to 50 times.

Photolithography resembles the conve-ntional lithography used in printing and photography. Its main disadvantages are that it requires a fiat substrate to start with, it is not very effective at creating shapes that are not fiat.

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