372596192

196 T. Nishidono et al.

196 T. Nishidono et al.

nanow fingcrs

base

tn A

O

RO. 5 contact projection

(1) Cut t i ng

(2) Koralng

(3) Cleaning j (4) Ag i ng|

(5) Acid cleaning (6) Electroplating

(1) with wire elecirical discharge machining

(3)    wilh 1.1,1 -irichlorelhane

(4)    340 *C x 3 hr in N2 gas

(5)    in H2SO4

(6)    wilh silver

Fig. 4. Manufacturing process of a sliding finger.

We manufactured a new bellows assembly, and measured the contact force and resistance, using a simple instrument shown in Fig. 3. The sliding fingers were madę of 0.5-mm thick Be-Cu sheet metal by a process shown in Fig. 4, and coated with silver to 3 //m in thickness to decrease contact resistance. Figurę 5 shows a schematic diagram of the fingers. Preliminary experimen-tal results of the contact force are in the rangę of 30 g to 50 g at narrow fingers and 150 g at wide ones, compared with contact forces calculated are 42 g and 345 g, respectively. The total contact

Fig. 5. Schematic diagram of the model of a sliding finger.

resistance of 43 fingers is 0.8 mC. The results do not satisfy our requirements; therefore a new design to increase the contact force is in Progress.