372596188
194 T. Nishidono et al.
(a)
0123456789101112
Point number of measurement
(b)
600 400 200 0
-200 -400 -600
Displacement ([im )
01 23456789101112
Point number of measurement
Fig. 3. Displacements of the chamber from the initial installation position (a) with and (b) without slide guides. □, lst bakeout; A, 2nd bakeout.
accuracy of 62 //m even with a measurement error of 8 //m. This result with slide guides is to be compared with the result without the slide guides. The result without the slide guides is shown in Fig. 3 (b). The maximum displacement from the initial installation position was morę than 400 //m in the horizontal direction after first bakeout, which was invariant after second ba-keout. The displacement of the vartical direction was less than tens of micrometers after bakeout because supports suppressed the downward displacement.
To confirm the reliability of chamber deforma-tions before and after bakeout, detailed tests are in progress. From the results of the preliminary tests, we conclude that the slide guide satisfies the restorability of BPM with an accuracy to within 62 //m.
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