DSC02783

DSC02783



19 Click thc Delete Interior Boundaries button.

Tm> amposite objccts. one for cneb sidc oftbe comb.

Next draw thc outline of thc subsrratc and bounding air spacc for thc analysis. In this casc, cxtcnd thc spacc 10 microns on cithcr sidc ot'thc comb tccth.

20 Creatc anothcr rectanglc:

SUCE

POSITION

NAME

WIDTH

HEIGHT

BASE

X

Y

R1

746-6

546-6

comer

-10e-6

-IOe-6

21 Click Zoom Extents.

The comb mth thc subsrratc and hm ud i na air spacc. Extruding the Geometry

First cxtrudc thc rwo comb drivcs into a 3D gcomcrn. | Front thc Draw menu choosc Ertrude,

46 | CHAMEK 2 ME MS ACTUATOR MODUS



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