1H4
Figurę 3-2. In the
ESEM the vacuum system is divided into as many as five stages of increasing vacuum, separated by pressure limiting apertures. In this schematic the stages are the sample chamber, first environmental chamber (ECI), second environmental chamber (EC2), column, and gun chamber.
System próżniowy z aperturami oddzielającymi poszczególne części kolumny (próżnia wzrasta w stronę
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