DSC 70 (4)

11    In the Coordinates area, change the x, y, and z values to 0.5e - 3,0.5e -3, and 40e - 6, respectively.

12    Click OK. The rcsults appear in Figurę 2-12 on pagc 60.

13    From the Postprocessing menu choose Cross-Section Plot Parameters.

14    Click the Line/Extrusion tab.

15    Sclect the Linę plot option.

16    In the Predefined quantities list selcct Total displacement.

17    Change the x-axis data to x.

18    Change the values in the Cross-section linę data area as follows:

NAME	VALUE	NAME	YALUE	NAME	VALUE
x0	0	y0	0 01 CD CO	z0	40e-6
X 1	1e-3	y!	0.5e-3	zl	40e-6

19 Click OK. The results appear in Figurę 2-13 on page 60.

YISUALIZING THE RELEASED STRESS STATE Follow the steps below to create Figurę 2-14 on page 61.

1    From the Postprocessing menu choose Plot Parameters.

2    Click the Boundary tab.

3    Find the Boundary data area, and in the Expression edit field enter s1_smsld.

4    Click OK.

Rcfcrence

1. G. Kovacs, Micromachined Transducers Sourcebook, WCM McGraw-Hill, 1998.